PREPARATION, FORMATION AND OPTICAL PROPERTY OF IN-SB-TE ALLOY THIN-FILM BY FLASH EVAPORATION TECHNOLOGY AND VACUUM ANNEALING

In32Sb32Te36 alloy thin films were successfully formed for the first time by a special process of flash evaporation followed by vacuum annealing. The microstructure of an as-deposited film was found by electrom diffraction analysis to be a mixture of crystalline and amorphous phase. After annealing, the film was found to transform to a polycrystalline structure and was identified to be homogeneous in chemical composition by EDAX. The films have both high reflectivity and high transmittance in long wavelength rather than in short wavelength. The difference of reflectivity between as-deposited and annealed films in short wavelength is larger than that in long wavelength, e.g. 15% more at wavelengths shorter than 400 nm. Some discussions are given on the correlations between the evaporation characteristics of sources, phase formations, and optical properties of films.