FILM THICKNESS MEASUREMENTS USING ELLIPSOMETRY WHEN THE LOWER INTERFACE IS UNCHARACTERIZED

被引：5
|
作者：
TOMPKINS, HG
机构：
来源：
THIN SOLID FILMS | 1989年 / 181卷
关键词：
D O I：
10.1016/0040-6090(89)90496-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：285 / 294
页数：10
相关论文
共 50 条
  • [1] THE INFLUENCES OF ROUGHNESS ON FILM THICKNESS MEASUREMENTS BY MUELLER MATRIX ELLIPSOMETRY
    RAMSEY, DA
    LUDEMA, KC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (09): : 2874 - 2881
  • [2] MONITORING OF THIN FILM THICKNESS BY ELLIPSOMETRY
    SIROHI, RS
    APPLIED OPTICS, 1969, 8 (02): : 483 - &
  • [3] OXIDE THICKNESS MEASUREMENTS BY IR ELLIPSOMETRY
    ALLEN, TH
    SUNDERLAND, RJ
    THIN SOLID FILMS, 1977, 45 (01) : 169 - 182
  • [4] FILM THICKNESS DETERMINATION OF PMMA ON INP BY ELLIPSOMETRY
    SCHEPS, R
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : 540 - 543
  • [5] Film thickness measurements by using acoustic sensors
    Ning, Z
    Yong, J
    Bo, CJ
    Seizo, K
    MULTIPHASE, NON-NEWTONIAN AND REACTING FLOWS, VOL 2, PROCEEDINGS, 2004, : 263 - 266
  • [6] Measurements of liquid film thickness for a droplet at a two-fluid interface
    Oldenziel, G.
    Delfos, R.
    Westerweel, J.
    PHYSICS OF FLUIDS, 2012, 24 (02)
  • [7] ON CALCULATION OF THIN FILM REFRACTIVE INDEX AND THICKNESS BY ELLIPSOMETRY
    HOLMES, DA
    APPLIED OPTICS, 1967, 6 (01): : 168 - &
  • [8] Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements
    Srisuwan, S.
    Sirisathitkul, C.
    Danworaphong, S.
    MAPAN-JOURNAL OF METROLOGY SOCIETY OF INDIA, 2015, 30 (01): : 31 - 36
  • [9] Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements
    S. Srisuwan
    C. Sirisathitkul
    S. Danworaphong
    MAPAN, 2015, 30 : 31 - 36
  • [10] Calibrating ESCA and ellipsometry measurements of perfluoropolyether lubricant thickness
    Toney, MF
    Mate, CM
    Pocker, D
    IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) : 1774 - 1776
12345