ION-BEAM RESISTS

被引:0
|
作者
JENSEN, JE
机构
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:145 / 150
页数:6
相关论文
共 50 条
  • [41] PROFILE CONTROL BY CHEMICALLY ASSISTED ION-BEAM AND REACTIVE ION-BEAM ETCHING
    CHINN, JD
    ADESIDA, I
    WOLF, ED
    APPLIED PHYSICS LETTERS, 1983, 43 (02) : 185 - 187
  • [42] VISUAL ION-BEAM IMAGES PRODUCED BY ELECTRON AND ION-BEAM INTERACTION ON SURFACES
    FINE, J
    GORDEN, R
    JOURNAL OF APPLIED PHYSICS, 1978, 49 (03) : 1236 - 1240
  • [43] Extinction of large droplets in ion-beam ablation plasma produced by ion-beam evaporation
    Shishido, H
    Yanagi, H
    Kawahara, H
    Suzuki, T
    Yunogami, T
    Suematsu, H
    Jiang, WH
    Yatsui, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (1B): : 698 - 700
  • [44] THE MECHANISMS OF ION-BEAM MODIFICATION OF PMMA FOR DRY ETCH DEVELOPMENT ION-BEAM LITHOGRAPHY
    BEALE, MIJ
    BROUGHTON, C
    PIDDUCK, AJ
    DESHMUKH, VGI
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 995 - 1000
  • [45] ION-BEAM LITHOGRAPHY - AN INVESTIGATION OF RESOLUTION LIMITS AND SENSITIVITIES OF ION-BEAM EXPOSED PMMA
    KARAPIPERIS, L
    DUBREUIL, D
    DAVID, P
    DIEUMEGARD, D
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 353 - 357
  • [46] ION-BEAM ASSISTED MASKLESS ETCHING OF GAAS BY 50 KEV FOCUSED ION-BEAM
    GAMO, K
    OCHIAI, Y
    NAMBA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (12): : L792 - L794
  • [47] ION-BEAM THERMOGRAPHY - ANALYSIS OF CHEMICAL-COMPOUNDS USING ION-BEAM TECHNIQUES
    MARTINSSON, BG
    HANSSON, HC
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 34 (02): : 203 - 208
  • [48] ION-BEAM ASSISTED ETCHING OF GAAS BY LOW-ENERGY FOCUSED ION-BEAM
    KOSUGI, T
    GAMO, K
    NAMBA, S
    AIHARA, R
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (05): : 2660 - 2663
  • [49] Extinction of large droplets in ion-beam ablation plasma produced by ion-beam evaporation
    Shishido, H., 1600, Japan Society of Applied Physics (44):
  • [50] Ion-Beam Sculpting of Nanowires
    Aramesh, Morteza
    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2018, 12 (01):