共 50 条
- [1] ION-BEAM EXPOSURE CHARACTERISTICS OF RESISTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1889 - 1892
- [2] ION-BEAM SENSITIVITY OF POLYMER RESISTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1358 - 1362
- [5] SURFACE IMAGING OF FOCUSED ION-BEAM EXPOSED RESISTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3432 - 3435
- [7] ION-BEAM EXPOSURE OF RESISTS .1. STATISTICAL LIMITATIONS APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (04): : 239 - 241
- [8] A PERCOLATION APPROACH TO ION-BEAM INDUCED MODIFICATIONS OF ORGANIC RESISTS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 513 - 516
- [10] FOCUSED ION-BEAM LITHOGRAPHY WITH TRANSITION-METAL OXIDE RESISTS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (10): : 2090 - 2094