OPTIMIZATION OF A MOSE2 THIN-FILM DEPOSITION TECHNIQUE

被引：19
作者：
BERNEDE, JC
MALLOUKY, A
POUZET, J
机构：
来源：
MATERIALS CHEMISTRY AND PHYSICS | 1988年 / 20卷 / 03期
关键词：
D O I：
10.1016/0254-0584(88)90061-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：201 / 214
页数：14
相关论文
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