SURFACE-MORPHOLOGY OF GAAS GROWN BY GAS-SOURCE MBE USING TRIMETHYLGALLIUM AND ARSENIC

被引:11
作者
ISHIKAWA, H
KONDO, K
SASA, S
TANAKA, H
HIYAMIZU, S
机构
关键词
D O I
10.1016/0022-0248(86)90404-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
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页码:521 / 524
页数:4
相关论文
共 17 条
[1]   MORPHOLOGICAL DEFECTS ARISING DURING MBE GROWTH OF GAAS [J].
BACHRACH, RZ ;
KRUSOR, BS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :756-764
[2]   MICROTWINNING AND GROWTH DEFECTS IN GAAS MBE LAYERS [J].
BAFLEUR, M ;
MUNOZYAGUE, A ;
ROCHER, A .
JOURNAL OF CRYSTAL GROWTH, 1982, 59 (03) :531-538
[3]   SOURCE AND ELIMINATION OF OVAL DEFECTS ON GAAS FILMS GROWN BY MOLECULAR-BEAM EPITAXY [J].
CHAI, YG ;
CHOW, R .
APPLIED PHYSICS LETTERS, 1981, 38 (10) :796-798
[4]   INITIAL RESULTS OF A HIGH THROUGHPUT MBE SYSTEM FOR DEVICE FABRICATION [J].
HWANG, JCM ;
BRENNAN, TM ;
CHO, AY .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (02) :493-496
[5]   STRUCTURE-ANALYSIS OF OVAL DEFECT ON MOLECULAR-BEAM EPITAXIAL GAAS LAYER BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION [J].
KAKIBAYASHI, H ;
NAGATA, F ;
KATAYAMA, Y ;
SHIRAKI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (11) :L846-L848
[6]   MBE GROWTH OF HIGH-QUALITY GAAS USING TRIETHYLGALLIUM AS A GALLIUM SOURCE [J].
KONDO, K ;
ISHIKAWA, H ;
SASA, S ;
SUGIYAMA, Y ;
HIYAMIZU, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (01) :L52-L53
[7]  
KONDO KK, 1986, I PHYS C SER, V79
[8]   CLASSIFICATION OF SURFACE-DEFECTS ON GAAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
NANBU, K ;
SAITO, J ;
ISHIKAWA, T ;
KONDO, K ;
SHIBATOMI, A .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (03) :601-604
[9]   GAAS GROWTH IN METAL-ORGANIC MBE [J].
PUTZ, N ;
VEUHOFF, E ;
HEINECKE, H ;
HEYEN, M ;
LUTH, H ;
BALK, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (02) :671-673
[10]   HILLOCK DEFECTS IN INGAAS/INP MULTI-LAYERS GROWN BY MBE [J].
SAITO, H ;
BORLAND, JO ;
ASAHI, H ;
NAGAI, H ;
NAWATA, K .
JOURNAL OF CRYSTAL GROWTH, 1983, 64 (03) :521-528