ELLIPSOMETRIC INVESTIGATION OF CORROSION OF DEPOSITED THIN MOLYBDENUM FILM

被引：10
作者：
OIKAWA, H [1 ]
机构：
[1] NIPPON TELEGRAPH & TEL PUBL CORP,ELECT COMMUN LAB,TOKYO,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1975年 / 14卷 / 05期
关键词：
D O I：
10.1143/JJAP.14.629
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：629 / 635
页数：7
相关论文
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