IDENTIFYING AN ETCH PROCESS WINDOW USING RESPONSE-SURFACE METHODOLOGY

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作者：

DANIEL, DW

BLOOM, R

REECE, JE

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SOLID STATE TECHNOLOGY | 1988年 / 31卷 / 09期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：117 / 120

页数：4

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