THIN-FILM REACTIONS IN THE SYSTEM TI-SI-O-N

被引：7

作者：

KUIPER, AET

WILLEMSEN, MFC

BARBOUR, JC

机构：

[1] Philips Research Lab, Netherlands

来源：

APPLIED SURFACE SCIENCE | 1988年 / 35卷 / 02期

关键词：

D O I：

10.1016/0169-4332(88)90048-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Titanium and Alloys

引用

页码：186 / 198

页数：13

共 19 条

[1] FORMATION OF TISI2 AND TIN DURING NITROGEN ANNEALING OF MAGNETRON SPUTTERED TI FILMS [J].

ADAMS, ED ;

AHN, KY ;

BRODSKY, SB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2264-2267

[2] DEVELOPMENT OF THE SELF-ALIGNED TITANIUM SILICIDE PROCESS FOR VLSI APPLICATIONS [J].

ALPERIN, ME ;

HOLLAWAY, TC ;

HAKEN, RA ;

GOSMEYER, CD ;

KARNAUGH, RV ;

PARMANTIE, WD .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1985, 20 (01) :61-69

[3] THIN-FILM REACTION BETWEEN TI AND SI3N4 [J].

BARBOUR, JC ;

KUIPER, AET ;

WILLEMSEN, MFC ;

READER, AH .

APPLIED PHYSICS LETTERS, 1987, 50 (15) :953-955

[4] THE THIN-FILM REACTION BETWEEN TI AND THERMALLY GROWN SIO2 [J].

BARBOUR, JC ;

FISCHER, AEMJ ;

VANDERVEEN, JF .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) :2582-2584

[5] TITANIUM SILICIDE FORMATION - EFFECT OF OXYGEN DISTRIBUTION IN THE METAL-FILM [J].

BERTI, M ;

DRIGO, AV ;

COHEN, C ;

SIEJKA, J ;

BENTINI, GG ;

NIPOTI, R ;

GUERRI, S .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) :3558-3565

[6]

BEYERS R, 1985, MATER RES SOC S P, V47, P143

[7] TITANIUM SILICON AND SILICON DIOXIDE REACTIONS CONTROLLED BY LOW-TEMPERATURE RAPID THERMAL ANNEALING [J].

BRILLSON, LJ ;

SLADE, ML ;

RICHTER, HW ;

VANDERPLAS, H ;

FULKS, RT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :993-997

[8] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J].

DOOLITTLE, LR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) :344-351

[9] THERMAL NITRIDATION OF SILICON DIOXIDE FILMS [J].

HABRAKEN, FHPM ;

KUIPER, AET ;

TAMMINGA, Y .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) :6996-7002

[10]

Hansen M., 1958, CONSTITUTION BINARY, P989

← 1 2 →