PARTIALLY PLANARIZED OXIDE BY PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION

被引：0

作者：

SMITH, GC ^{[1
]}

PURDES, AJ ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C312 / C312

页数：1

共 50 条

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