RESIDUAL-GAS ANALYZERS AND THEIR USE IN HIGH-VACUUM SYSTEMS

被引：13

作者：

MAO, FM

YANG, JM

AUSTIN, WE

LECK, JH

机构：

[1] Univ of Liverpool, Liverpool, Engl, Univ of Liverpool, Liverpool, Engl

来源：

VACUUM | 1987年 / 37卷 / 3-4期

关键词：

It is a pleasuret o acknowledge the contribution made to this work by Mr Peter Nash of the National Physical Laboratory and financial support from the Department of Trade and Industry;

D O I：

10.1016/0042-207X(87)90020-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：335 / 338

页数：4