MECHANICAL DEFLECTION OF CANTILEVER MICROBEAMS - A NEW TECHNIQUE FOR TESTING THE MECHANICAL-PROPERTIES OF THIN-FILMS

被引：275
作者：
WEIHS, TP
HONG, S
BRAVMAN, JC
NIX, WD
机构：
来源：
JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 05期
关键词：
D O I：
10.1557/JMR.1988.0931
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：931 / 942
页数：12
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