COMPARISON OF XEF2 AND F-ATOM REACTIONS WITH SI AND SIO2

被引：95

作者：

IBBOTSON, DE

FLAMM, DL

MUCHA, JA

DONNELLY, VM

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 12期

关键词：

D O I：

10.1063/1.94665

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1129 / 1131

页数：3

共 15 条

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