IMAGING ZONE PLATES FOR X-RAY MICROSCOPY FABRICATED BY ELECTRON-BEAM LITHOGRAPHY

被引：5
|
作者：
UNGER, P [1 ]
BOGLI, V [1 ]
BENEKING, H [1 ]
NIEMANN, B [1 ]
GUTTMANN, P [1 ]
机构：
[1] UNIV GOTTINGEN,FORSCH GRP RONTGENMIKROSKOPIE,D-3400 GOTTINGEN,FED REP GER
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期
关键词：
D O I：
10.1116/1.583989
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：323 / 327
页数：5
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