共 13 条
[2]
ANDERSEN HH, 1981, TOP APPL PHYS, V47, pCH4
[4]
Hechtl E., 1981, J NUCL MATER, V103, P333
[5]
INFLUENCE OF REACTIVE GASES ON SPUTTERING AND SECONDARY ION EMISSION - OXIDATION OF TITANIUM AND VANADIUM DURING ENERGETIC PARTICLE IRRADIATION
[J].
APPLIED PHYSICS,
1978, 16 (03)
:271-278
[6]
SPUTTERING OF METALS IN PRESENCE OF REACTIVE GASES
[J].
THIN SOLID FILMS,
1977, 42 (02)
:185-191
[8]
Kelly R., 1973, Radiation Effects, V19, P39, DOI 10.1080/00337577308232213
[9]
ROTH J, 1983, TOPICKS APPLIED PHYS, V52, pCH3
[10]
LOW-ENERGY SELFSPUTTERING YIELDS OF MOLYBDENUM AND TUNGSTEN
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1983, 22 (09)
:1361-1365