SCANNING-X-RAY STEPPER FOR SYNCHROTRON RADIATION

被引：0
|
作者：
CULLMANN, E [1 ]
VACH, W [1 ]
COOPER, K [1 ]
机构：
[1] KARL SUSS AMER,WATERBURY,VT
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 07期
关键词：
D O I：
10.1063/1.1141063
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：2150 / 2152
页数：3
相关论文
共 50 条
  • [31] COLOR DISPLAY OF LAUE PATTERNS WITH A SCANNING-X-RAY BEAM
    YONEDA, Y
    HORIUCHI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (06) : 1169 - 1172
  • [32] SCANNING-X-RAY MICROPROBE WITH BRAGG-FRESNEL MULTILAYER LENS
    CHEVALLIER, P
    DHEZ, P
    LEGRAND, F
    ERKO, A
    VIDAL, B
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1993, (130): : 617 - 620
  • [33] SCANNING-X-RAY MICROSCOPY USING A LASER-PLASMA SOURCE
    MICHETTE, AG
    TURCU, ICE
    SCHULZ, MS
    BROWNE, MT
    MORRISON, GR
    FLUCK, P
    BUCKLEY, CJ
    FOSTER, GF
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (06): : 1478 - 1482
  • [34] X-RAY STEPPER AIMING AT 0.2-MU-M SYNCHROTRON ORBITAL RADIATION LITHOGRAPHY
    UCHIDA, N
    KUWABARA, O
    ISHIBASHI, Y
    KIKUIRI, N
    HIRANO, R
    NISHIDA, J
    NISHIZAKA, T
    KIKUCHI, Y
    YOSHINO, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2997 - 3002
  • [35] SCANNING-X-RAY MICROSCOPE USES EXCIMER-LASER SOURCE
    DANCE, B
    LASER FOCUS WORLD, 1991, 27 (04): : 38 - &
  • [36] APPLICATION OF NUCLEAR-PARTICLE TRACKS - A SCANNING-X-RAY MICROSCOPE
    EBERT, PJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1992, 319 (1-3): : 326 - 332
  • [37] WIDERANGE CURRENT-CODE CONVERTER FOR A SCANNING-X-RAY TOMOGRAPH
    ANDREEV, EA
    BASENKO, VK
    KOSHARSKII, KG
    PSHENICHNYI, SA
    SKOPYUK, MI
    SITKO, SP
    SHEVCHENKO, VA
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1984, 27 (04) : 881 - 884
  • [38] DEFECT SIGNAL IN A RADIOMETRIC FLAW DETECTOR WITH A SCANNING-X-RAY BEAM
    MORGOVSKII, LY
    RUSSIAN JOURNAL OF NONDESTRUCTIVE TESTING, 1992, 28 (11) : 720 - 728
  • [39] SCANNING-X-RAY APPARATUS FOR TEXTURE MAPPING BY ENERGY DISPERSIVE DIFFRACTION
    SCHWARZER, RA
    TEXTURES AND MICROSTRUCTURES, 1991, 14 : 241 - 244
  • [40] QUANTITATIVE METHODS FOR THE APPLICATION OF THE SCANNING-X-RAY ANALYTICAL MICROPROBE (SXRAM)
    VOGLIS, P
    RINDBY, A
    JOURNAL OF TRACE AND MICROPROBE TECHNIQUES, 1995, 13 (02): : 177 - 193
12345