SCANNING-X-RAY STEPPER FOR SYNCHROTRON RADIATION

被引：0
|
作者：
CULLMANN, E [1 ]
VACH, W [1 ]
COOPER, K [1 ]
机构：
[1] KARL SUSS AMER,WATERBURY,VT
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 07期
关键词：
D O I：
10.1063/1.1141063
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：2150 / 2152
页数：3
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