MORPHOLOGY STUDIES OF GAAS EPITAXIAL LAYERS GROWN BY PLASMA-ENHANCED MOCVD

被引:0
作者
SHEN, Q
MONGOL, N
HUELSMAN, A
YOON, E
REIF, R
机构
[1] NEI MONGOL INST MET RES,BAOTOU,PEOPLES R CHINA
[2] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
关键词
D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:C485 / C485
页数:1
相关论文
共 50 条
[41]   GROWTH-RATE OF GAAS EPITAXIAL-FILMS GROWN BY MOCVD [J].
SATO, M ;
SUZUKI, M .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (06) :1540-1548
[42]   Study of GaP Nucleation Layers Grown on Si by Plasma-Enhanced Atomic Layer Deposition [J].
Gudovskikh, Alexander S. ;
Uvarov, Alexander. V. ;
Morozov, Ivan A. ;
Bukatin, Anton S. ;
Baranov, Artem I. ;
Kudryashov, Dmitry A. ;
Kalyuzhnyy, Nikolay A. ;
Mintairov, Sergey A. ;
Zubkov, Vasily I. ;
Yakovlev, George E. ;
Kleider, Jean-Paul .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2020, 217 (04)
[43]   Phase separation phenomenon in MOCVD-grown GaInP epitaxial layers [J].
Tsai, Yu-Li ;
Horng, Ray-Hua ;
Tseng, Ming-Chun ;
Kuo, Chia-hao ;
Liu, Po-Liang ;
Wuu, Dong-Sing ;
Lin, Der-Yuh .
JOURNAL OF CRYSTAL GROWTH, 2009, 311 (11) :3220-3224
[44]   Orientation dependence of HgCdTe epitaxial layers grown by MOCVD on Si substrates [J].
Shigenaka, K ;
Matsushita, K ;
Sugiura, L ;
Nakata, F ;
Hirahara, K ;
Uchikoshi, M ;
Nagashima, M ;
Wada, H .
JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (08) :1347-1352
[45]   Surface morphology and photoluminescence studies of Sb-doped ZnO layers grown using MOCVD [J].
Sartel, Corinne ;
Haneche, Nadia ;
Jomard, Francois ;
Lusson, Alain ;
Vilar, Christele ;
Laroche, Jean-Michel ;
Galtier, Pierre ;
Sallet, Vincent .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2010, 247 (07) :1687-1690
[46]   EXAFS studies of plasma-enhanced MBE grown Group III-Nitrides [J].
Univ of Nottingham, Nottingham, United Kingdom .
Mater Sci Eng B Solid State Adv Technol, 1-3 (38-41)
[47]   ZnTe LAYERS GROWN ON GaAs SUBSTRATES BY LOW PRESSURE MOCVD. [J].
Shtrikman, Hadas ;
Raizman, A. ;
Oron, M. ;
Eger, D. .
Journal of Crystal Growth, 1600, 88 (04) :522-526
[48]   EXAFS studies of plasma-enhanced MBE grown Group III-Nitrides [J].
Blant, AV ;
Cheng, TS ;
Jeffs, NJ ;
Foxon, CT ;
Bailey, C ;
Harrison, PG ;
Dent, AJ ;
Mosselmans, JFW .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 50 (1-3) :38-41
[49]   Photothermal deflection studies of GaAs epitaxial layers [J].
George, NA ;
Vallabhan, CPG ;
Nampoori, VPN ;
Radhakrishnan, P .
APPLIED OPTICS, 2002, 41 (24) :5179-5184
[50]   Photothermal deflection studies of GaAs epitaxial layers [J].
Department of Applied Physics, Thermal and Fluids Sciences Section, Delft University of Technology, Delft, Netherlands .
Applied Optics, 2002, 41 (24) :5179-5184