DETERMINATION OF DIFFUSION, PARTITION AND STICKING COEFFICIENTS FOR BORON, PHOSPHORUS AND ANTIMONY IN SILICON

被引：12

作者：

BENNETT, RJ ^{[1
]}

PARISH, C ^{[1
]}

机构：

[1] UNIV KENT,ELECTR LABS,CANTERBURY,KENT,ENGLAND

来源：

SOLID-STATE ELECTRONICS | 1975年 / 18卷 / 10期

关键词：

D O I：

10.1016/0038-1101(75)90003-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：833 / 838

页数：6

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