PREPARATION AND PROPERTIES OF SPUTTERED GLASSY CARBON-FILMS

被引：19
|
作者：
MARINKOVIC, Z [1 ]
ROY, R [1 ]
机构：
[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802
来源：
CARBON | 1976年 / 14卷 / 06期
关键词：
D O I：
10.1016/0008-6223(76)90005-1
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：329 / 331
页数：3
相关论文
共 50 条
  • [1] PREPARATION AND PROPERTIES OF DIAMONDLIKE CARBON-FILMS
    FRANKS, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 2307 - 2310
  • [2] PRESSURE AND PLASMA EFFECTS ON THE PROPERTIES OF MAGNETRON SPUTTERED CARBON-FILMS
    ROSSNAGEL, SM
    RUSSAK, MA
    CUOMO, JJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 2150 - 2153
  • [3] OPTICAL AND MECHANICAL-PROPERTIES OF DC SPUTTERED CARBON-FILMS
    RUBIN, M
    HOPPER, CB
    CHO, NH
    BHUSHAN, B
    JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) : 2538 - 2542
  • [4] PREPARATION AND PROPERTIES OF CARBON-FILMS WITH MAGNETRON SPUTTERING
    HOSOKAWA, N
    KONISHI, A
    HIRATSUKA, H
    ANNOH, K
    THIN SOLID FILMS, 1980, 73 (01) : 115 - 116
  • [5] OPTICAL CHARACTERIZATION OF SPUTTERED CARBON-FILMS
    AGER, JW
    IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (01) : 259 - 263
  • [6] PREPARATION AND ADSORPTION STRUCTURAL PROPERTIES OF MICROPOROUS CARBON-FILMS
    ERMOLENKO, IN
    GAVRILOV, MZ
    COLLOID JOURNAL OF THE USSR, 1975, 37 (01): : 134 - 135
  • [7] PREPARATION OF DOPED CARBON-FILMS
    INGERSOLL, D
    HUSKISSON, DH
    JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1991, 307 (1-2): : 281 - 285
  • [8] LOW-TEMPERATURE CRYSTALLIZATION OF SPUTTERED CARBON-FILMS
    YANEZLIMON, JM
    RUIZ, F
    GONZALEZHERNANDEZ, J
    CHAO, BS
    OVSHINSKY, SR
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (05) : 3015 - 3019
  • [9] THICKNESS-DEPENDENT STRESS IN SPUTTERED CARBON-FILMS
    PUCHERT, MK
    TIMBRELL, PY
    LAMB, RN
    MCKENZIE, DR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (03): : 727 - 732
  • [10] FORMATION OF POROSITY IN SPUTTERED AMORPHOUS HYDROGENATED CARBON-FILMS
    YIN, Y
    COLLINS, RE
    ZHANG, QC
    JOURNAL OF MATERIALS SCIENCE, 1994, 29 (22) : 5794 - 5800
12345