THERMALLY DRIVEN PHASE-CHANGE MICROACTUATION

被引：47
作者：
BERGSTROM, PL [1 ]
JI, J [1 ]
LIU, YN [1 ]
KAVIANY, M [1 ]
WISE, KD [1 ]
机构：
[1] UNIV MICHIGAN,DEPT MECH ENGN & APPL MECH,ANN ARBOR,MI 48109
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1995年 / 4卷 / 01期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1109/84.365365
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes a microactuation scheme based on thermally driven liquid-vapor phase-change in a partially filled sealed cavity, A test structure for studying this system has been designed and fabricated, The cavity is 900 mu m by 900 mu m by 300 mu m in size with a thin, 600 mu m by 800 mu m grid-shaped heater located on the floor of the cavity and elevated approximately 8 mu m above it, The heater is composed of open diamond-shaped unit cells defined by 12-mu m-wide, 3-mu m-thick bulk-silicon beams, giving an overall electrical heater resistance of 3-10 Omega. Using methanol as the cavity fluid with partial filling, drive levels of 10 mW sustain a 13-Atm pressure rise within the cavity. Real-time measurements demonstrate a pressure response time on the order of 100 ms for an input power of 100 mW, Simulated pressure response calculations indicate the potential for an optimized response time on the order of 40 ms at this power level.
引用
收藏
页码：10 / 17
页数：8
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