GENERALIZED-MODEL FOR THE CLUSTERING OF AS DOPANTS IN SI

被引:63
作者
GUERRERO, E
POTZL, H
TIELERT, R
GRASSERBAUER, M
STINGEDER, G
机构
[1] VIENNA TECH UNIV, INST ANALYT CHEM, A-1040 VIENNA, AUSTRIA
[2] SIEMENS AG, CENT RES LABS, MUNICH, GERMANY
[3] LUDWIG BOLTZMANN INST SOLID STATE PHYS, Vienna, AUSTRIA
关键词
D O I
10.1149/1.2124302
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1826 / 1831
页数:6
相关论文
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