OPTICAL DIAGNOSTICS OF LOW-PRESSURE PLASMAS

被引：78

作者：

DREYFUS, RW ^{[1
]}

JASINSKI, JM ^{[1
]}

WALKUP, RE ^{[1
]}

SELWYN, GS ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL DEV LAB,HOPEWELL JUNCTION,NY 12533

来源：

PURE AND APPLIED CHEMISTRY | 1985年 / 57卷 / 09期

关键词：

D O I：

10.1351/pac198557091265

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：1265 / 1276

页数：12

共 60 条

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