OPTICAL DIAGNOSTICS OF LOW-PRESSURE PLASMAS

被引：78
作者：
DREYFUS, RW [1 ]
JASINSKI, JM [1 ]
WALKUP, RE [1 ]
SELWYN, GS [1 ]
机构：
[1] IBM CORP,E FISHKILL DEV LAB,HOPEWELL JUNCTION,NY 12533
来源：
PURE AND APPLIED CHEMISTRY | 1985年 / 57卷 / 09期
关键词：
D O I：
10.1351/pac198557091265
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：1265 / 1276
页数：12
相关论文
共 60 条
[1]   OBSERVATION OF THE NU-1 FUNDAMENTAL-BAND OF H2D+ [J].
AMANO, T ;
WATSON, JKG .
JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (07) :2869-2871
[2]   MEASUREMENT OF H- DENSITY IN A PLASMA BY PHOTODETACHMENT [J].
BACAL, M ;
BRUNETEAU, AM ;
DOUCET, HJ ;
TAILLET, J ;
HAMILTON, GW .
JOURNAL DE PHYSIQUE, 1979, 40 :791-792
[3]   ON PLASMA DIAGNOSTICS [J].
BENENSON, DM ;
KWOK, HS .
PURE AND APPLIED CHEMISTRY, 1982, 54 (06) :1157-1180
[4]   DETECTION OF FLUORESCENCE FROM O-ATOMS AND N-ATOMS INDUCED BY 2-PHOTON ABSORPTION [J].
BISCHEL, WK ;
PERRY, BE ;
CROSLEY, DR .
APPLIED OPTICS, 1982, 21 (08) :1419-1429
[5]   2-PHOTON LASER-INDUCED FLUORESCENCE IN OXYGEN AND NITROGEN-ATOMS [J].
BISCHEL, WK ;
PERRY, BE ;
CROSLEY, DR .
CHEMICAL PHYSICS LETTERS, 1981, 82 (01) :85-88
[6]   MEASUREMENT OF ATOMIC-HYDROGEN DENSITIES AND VELOCITIES BY LASER-INDUCED FLUORESCENCE AT L-ALPHA [J].
BOGEN, P ;
DREYFUS, RW ;
LIE, YT ;
LANGER, H .
JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :75-80
[7]   2-PHOTON EXCITATION OF THE N = 3 LEVEL IN H-ATOM AND D-ATOM [J].
BOKOR, J ;
FREEMAN, RR ;
WHITE, JC ;
STORZ, RH .
PHYSICAL REVIEW A, 1981, 24 (01) :612-614
[8]   2-PHOTON INDUCED FLUORESCENCE AND RESONANCE-ENHANCED IONIZATION OF SULFUR-ATOMS [J].
BREWER, P ;
VANVEEN, N ;
BERSOHN, R .
CHEMICAL PHYSICS LETTERS, 1982, 91 (02) :126-129
[9]   OPTICAL-EMISSION SPECTROSCOPY OF REACTIVE PLASMAS - A METHOD FOR CORRELATING EMISSION INTENSITIES TO REACTIVE PARTICLE DENSITY [J].
COBURN, JW ;
CHEN, M .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3134-3136
[10]  
d'Agostino R., 1984, Plasma Chemistry and Plasma Processing, V4, P165, DOI 10.1007/BF00566839
123456