A MATHEMATICAL-MODEL FOR SPIN COATING OF POLYMER RESISTS

被引：214
作者：
FLACK, WW
SOONG, DS
BELL, AT
HESS, DW
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 04期
关键词：
D O I：
10.1063/1.334049
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1199 / 1206
页数：8
相关论文
共 24 条
[1]   ON THE FLOW OF A NON-NEWTONIAN LIQUID ON A ROTATING DISK [J].
ACRIVOS, A ;
SHAH, MJ ;
PETERSEN, EE .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) :963-968
[2]  
BAILLAGOU PE, 1983, THESIS U CALIFORNIA
[3]   A COMPUTER-MODEL FOR THE GEL EFFECT IN FREE-RADICAL POLYMERIZATION [J].
CHIU, WY ;
CARRATT, GM ;
SOONG, DS .
MACROMOLECULES, 1983, 16 (03) :348-357
[4]  
DAMON GF, 1969, P KODAK SEMINAR MICR, V34, P195
[5]   AN INVESTIGATION OF THE THICKNESS VARIATION OF SPUN-ON THIN-FILMS COMMONLY ASSOCIATED WITH THE SEMICONDUCTOR INDUSTRY [J].
DAUGHTON, WJ ;
GIVENS, FL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (01) :173-179
[6]  
DAUGHTON WJ, 1978, P KOD SEM MICR SAN D, P15
[7]  
de Gennes P.G., 1979, SCALING CONCEPTS POL
[8]  
Dorfman L. A., 1967, J ENG PHYS, V12, P162
[9]   FLOW OF A VISCOUS LIQUID ON A ROTATING DISK [J].
EMSLIE, AG ;
BONNER, FT ;
PECK, LG .
JOURNAL OF APPLIED PHYSICS, 1958, 29 (05) :858-862
[10]  
Fraidenraich N., 1976, Revista Mexicana de Fisica, V25, P69
123