INFLUENCES OF MOLECULAR REFLECTION ON THE LIFT-OFF PATTERN EDGE QUALITY

被引:1
作者
ARAI, K [1 ]
YANAGAWA, F [1 ]
KUROSAWA, S [1 ]
机构
[1] NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1984年 / 2卷 / 04期
关键词
D O I
10.1116/1.582858
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:658 / 664
页数:7
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