共 8 条
[1]
Glang R., 1970, HDB THIN FILM TECHNO
[2]
GOODMAN LA, 1977, IEEE T ELECTRON DEV, V24, P795, DOI 10.1109/T-ED.1977.18832
[3]
ZUM KONDENSATIONSVERHALTEN HOCHSIEDENDER SUBSTANZEN
[J].
ZEITSCHRIFT FUR PHYSIK,
1957, 149 (05)
:538-549
[5]
HIRTH JP, 1963, PROGR MATERIALS SCI
[6]
Siracusa M., 1980, International Electron Devices Meeting. Technical Digest, P438
[7]
WARNEKE AJ, 1977, P KODAK MICROELECTRO, P145