共 13 条
[2]
BORDERS JA, 1974, APPL ION BEAMS METAL, P179
[4]
LOW-TEMPERATURE MIGRATION OF SILICON THROUGH METAL FILMS IMPORTANCE OF SILICON-METAL INTERFACE
[J].
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,
1971, 7 (02)
:401-&
[5]
LOW-TEMPERATURE MIGRATION OF SILICON IN METAL-FILMS ON SILICON SUBSTRATES STUDIED BY BACKSCATTERING TECHNIQUES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1972, 9 (01)
:155-&
[9]
ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (01)
:86-93
[10]
MAYER JW, 1974, APPLICATION ION BEAM, P141