MICROWAVE ION-SOURCE USING RESONANT CAVITY

被引：7

作者：

TAHARA, H

YASUI, T

ONOE, K

TSUBAKISHITA, Y

YOSHIKAWA, T

机构：

[1] Department of Mechanical Engineering, Osaka University, Toyonaka, Osaka

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 3A期

关键词：

MICROWAVE ION SOURCE; CYLINDRICAL RESONANT CAVITY; REENTRANT COAXIAL RESONANT CAVITY; WEAK RING-CUSPED MAGNETIC FIELD; OFF-RESONANCE DISCHARGE; ELECTRON CYCLOTRON RESONANCE DISCHARGE; ELECTRIC FIELD MEASUREMENT; ION BEAM EXTRACTION EXPERIMENT;

D O I：

10.1143/JJAP.32.1298

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ring-cusped magnetic-field ion sources using 2.45-GHz-microwave resonant cavities were studied to develop high-performance compact ion sources for economically assisting material processings. The minimum flow rate required to sustain discharge was 10 sccm for weak-B-field off-resonance discharge in the TM011-mode-excitation cylindrical cavity, 6 sccm for weak-B-field discharge in the reentrant coaxial cavity, in which a stronger electric field was generated compared with that in the cylindrical cavity, and 3 sccm for electron cyclotron resonance (ECR) discharge in the cylindrical cavity. As a result of ion beam extraction, the highest mass utilization efficiency of 18.7% was achieved for ECR discharge.

引用

页码：1298 / 1302

页数：5

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