DEFECTS IN AMORPHOUS SI-N FILMS PREPARED BY RF SPUTTERING

被引：62
作者：
SHIMIZU, T
OOZORA, S
MORIMOTO, A
KUMEDA, M
ISHII, N
机构：
来源：
SOLAR ENERGY MATERIALS | 1982年 / 8卷 / 1-3期
关键词：
D O I：
10.1016/0165-1633(82)90074-0
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
引用
收藏
页码：311 / 317
页数：7
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