ANOMALOUS OXIDE-GROWTH ON SILICON WITH LOW OXYGEN PRESSURES

被引：0
作者：
FRANTSUZOV, AA
MAKRUSHIN, NI
SOKOLOV, RA
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SOVIET MICROELECTRONICS | 1982年 / 11卷 / 01期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：27 / 30
页数：4
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