共 50 条
- [2] DEFECTS IN OXYGEN-IMPLANTED SILICON-ON-INSULATOR STRUCTURES PROBED WITH POSITRONS PHYSICAL REVIEW B, 1991, 44 (04): : 1812 - 1816
- [10] TEM AND HREM STUDIES OF AS-IMPLANTED HIGH-DOSE OXYGEN-IMPLANTED SILICON AT DOSES AND ENERGIES SUITABLE FOR THIN-FILM SILICON-ON-INSULATOR SUBSTRATES MICROSCOPY OF SEMICONDUCTING MATERIALS 1993, 1993, (134): : 129 - 132