EFFECT OF POLAR GROUPS ON THE ELECTRICAL BREAKDOWN STRENGTH OF PLASMA-POLYMERIZED FILMS

被引：8
作者：
NAKANO, T
FUKUYAMA, M
HAYASHI, H
ISHII, K
OHKI, Y
机构：
[1] Department of Electrical Engineering, Waseda University, Tokyo
[2] Department of Electrical Engineering, National Defense Academy, Yokosuka
来源：
IEEE TRANSACTIONS ON ELECTRICAL INSULATION | 1990年 / 25卷 / 06期
关键词：
D O I：
10.1109/14.64493
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Electrical breakdown of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases after incorporation of fluorine atoms into the film when the pulse width is < 5-mu-s. This is due to the scattering of electronic carriers caused by C-F bonds.
引用
收藏
页码：1085 / 1091
页数：7
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