THE ADSORPTION AND DECOMPOSITION OF NH3 ON SI(100) - DETECTION OF THE NH2(A) SPECIES

被引:149
作者
DRESSER, MJ [1 ]
TAYLOR, PA [1 ]
WALLACE, RM [1 ]
CHOYKE, WJ [1 ]
YATES, JT [1 ]
机构
[1] UNIV PITTSBURGH,CTR SURFACE SCI,DEPT CHEM,PITTSBURGH,PA 15260
关键词
D O I
10.1016/0039-6028(89)90621-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:75 / 107
页数:33
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[31]   GENERAL COMPARISON OF THE SURFACE PROCESSES INVOLVED IN NITRIDATION OF SI(100)-2X1 BY NH3 AND IN SINX FILM DEPOSITION - A PHOTOEMISSION-STUDY [J].
KUBLER, L ;
BISCHOFF, JL ;
BOLMONT, D .
PHYSICAL REVIEW B, 1988, 38 (18) :13113-13123
[32]   SI-H BOND PRODUCTION BY NH3 ADSORPTION ON SI(111) - AN UPS STUDY [J].
KUBLER, L ;
HLIL, EK ;
BOLMONT, D ;
GEWINNER, G .
SURFACE SCIENCE, 1987, 183 (03) :503-514
[33]   LOW-TEMPERATURE NH3 ADSORPTION ON CLEAN AMORPHOUS-SILICON AND ON CRYSTALLINE SILICON SURFACES AND NITROGEN BONDING IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS - A COMPARATIVE X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY [J].
KUBLER, L ;
HLIL, EK ;
BOLMONT, D ;
PERUCHETTI, JC .
THIN SOLID FILMS, 1987, 149 (03) :385-392
[34]   THE EPITAXIAL FORMATION OF ADSORBED MULTILAYERS AS STUDIED BY ESDIAD - NH3 ADSORPTION ON TOP OF CHEMISORBED CO ON NICKEL CRYSTAL-SURFACES [J].
LANZILLOTTO, AM ;
DRESSER, MJ ;
ALVEY, MD ;
YATES, JT .
SURFACE SCIENCE, 1987, 191 (1-2) :15-27
[35]  
LEIFELS J, 1984, THESIS U HANNOVER HA
[36]   SI(100) SURFACE UNDER AN EXTERNALLY APPLIED STRESS [J].
MEN, FK ;
PACKARD, WE ;
WEBB, MB .
PHYSICAL REVIEW LETTERS, 1988, 61 (21) :2469-2471
[37]   DIGITAL TEMPERATURE PROGRAMMER FOR ISOTHERMAL AND THERMAL-DESORPTION MEASUREMENTS [J].
MUHA, RJ ;
GATES, SM ;
YATES, JT ;
BASU, P .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (04) :613-616
[38]   ELECTRON ENERGY-LOSS SPECTROSCOPY OF NO, O2 AND NH3 ON SI(111) SURFACES [J].
NISHIJIMA, M ;
FUJIWARA, K .
SOLID STATE COMMUNICATIONS, 1977, 24 (01) :101-103
[39]   MOLECULAR-BEAM SOURCES FABRICATED FROM MULTICHANNEL ARRAYS .2. EFFECT OF SOURCE SIZE AND ALIGNMENT [J].
OLANDER, DR .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) :4650-&
[40]  
Redhead P. A., 1962, VACUUM, V12, P203