RADICAL MOLECULE AND ION-MOLECULE MECHANISMS IN THE POLYMERIZATION OF HYDROCARBONS AND CHLOROSILANES IN RF PLASMAS AT LOW-PRESSURES (BELOW 1.0 TORR)

被引：12

作者：

AVNI, R

CARMI, U

INSPEKTOR, A

ROSENTHAL, I

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

[2] NUCL RES CTR NEGEV,IL-84190 BEERSHEBA,ISRAEL

来源：

THIN SOLID FILMS | 1984年 / 118卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90076-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：231 / 241

页数：11

共 32 条

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