SYNTHESIS OF VARIOUS OXIDES IN TI-O SYSTEM BY REACTIVE EVAPORATION AND ACTIVATED REACTIVE EVAPORATION TECHNIQUES

被引：24

作者：

GROSSKLAUS, W ^{[1
]}

BUNSHAH, RF ^{[1
]}

机构：

[1] UNIV CALIF,SCH ENGN,MAT DEPT,LOS ANGELES,CA 90024

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568618

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：593 / 597

页数：5

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