SYNTHESIS OF VARIOUS OXIDES IN TI-O SYSTEM BY REACTIVE EVAPORATION AND ACTIVATED REACTIVE EVAPORATION TECHNIQUES

被引：24

作者：

GROSSKLAUS, W ^{[1
]}

BUNSHAH, RF ^{[1
]}

机构：

[1] UNIV CALIF,SCH ENGN,MAT DEPT,LOS ANGELES,CA 90024

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568618

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：593 / 597

页数：5

共 26 条

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[3] PHASE ANALYSIS STUDIES ON THE TITANIUM-OXYGEN SYSTEM [J].

ANDERSSON, S ;

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MAGNELI, A .

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[4]

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[5]

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[6]

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[8]

Bunshah R.F, 1974, U.S. Patent, Patent No. [3,791,852, 3791852]

[9] ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J].

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[10]

BUNSHAH RF, 1974, 4 P INT C VAC MET, P17

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