EVIDENCE FOR FREE CARBON IN AMORPHOUS OMCVD SILICON-RICH SIXC1-X COATINGS

被引：4

作者：

MESTARI, A

MAURY, F

MORANCHO, R

机构：

来源：

JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期

关键词：

D O I：

10.1051/jphyscol:1989592

中图分类号：

学科分类号：

摘要：

引用

页码：765 / 772

页数：8

共 15 条

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