EFFECTS OF CHARGE NEUTRALIZATION ON ION-BEAM-DEPOSITED BORON-NITRIDE FILMS

被引：30

作者：

HALVERSON, W ^{[1
]}

QUINTO, DT ^{[1
]}

机构：

[1] KENNAMETAL INC,GREENSBURG,PA 15601

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.573268

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2141 / 2146

页数：6

共 14 条

[1]

GASHTOLD VN, 1970, ELEKTRON TEKH, V12, P58

[2]

Hamrin K., 1970, Physica Scripta, V1, P277, DOI 10.1088/0031-8949/1/5-6/018

[3] CHEMICAL BONDING AND ELECTRONIC-STRUCTURE OF B2O3, H3BO3, AND BN - ESCA, AUGER, SIMS, AND SXS STUDY [J].

JOYNER, DJ ;

HERCULES, DM .

JOURNAL OF CHEMICAL PHYSICS, 1980, 72 (02) :1095-1108

[4]

KAUFMAN HR, 1961, ELECTROSTATIC PROPUL, P3

[5] Anomalous secondary electron emission - A new phenomenon [J].

Malter, L .

PHYSICAL REVIEW, 1936, 49 (06) :0478-0478

[6] FORMATION OF CUBIC BORON-NITRIDE FILMS BY BORON EVAPORATION AND NITROGEN ION-BEAM BOMBARDMENT [J].

SATOU, M ;

FUJIMOTO, F .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (03) :L171-L172

[7]

SAWAOKA A, 1983, CERAM B, V62, P1379

[8] AMORPHOUS BN FILMS PRODUCED IN A DOUBLE-PLASMA REACTOR FOR SEMICONDUCTOR APPLICATIONS [J].

SCHMOLLA, W ;

HARTNAGEL, HL .

SOLID-STATE ELECTRONICS, 1983, 26 (10) :931-&

[9] ION-BEAM SYNTHESIS OF CUBIC BORON-NITRIDE [J].

SHANFIELD, S ;

WOLFSON, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :323-325

[10]

Wagner C., 1979, HDB XRAY PHOTOELECTR

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