CHARACTERIZATION OF PB(ZR, TI)O-3 THIN-FILMS PREPARED BY MULTI-ION-BEAM SPUTTERING

被引：14

作者：

KANNO, I

HAYASHI, S

KAMADA, T

KITAGAWA, M

HIRAO, T

机构：

[1] Central Research Laboratories, Matsushita Electric Industrial Co., Ltd, Moriguchi, Osaka, 570

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 1B期

关键词：

PZT; PLT; PBTIO3; PBZRO3; FERROELECTRIC THIN FILM; MULTI-ION-BEAM SPUTTERING; TEM; SIMS;

D O I：

10.1143/JJAP.33.574

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead-zirconate-titanate (PZT) thin films with lead-lanthanum-titanate (PLT) buffer layer prepared by multiion-beam sputtering were characterized from the structural and electrical viewpoints. Cross-sectional transmission electron microscopy (TEM) observation demonstrated the epitaxial growth of the films without intermixing layers or misfit dislocations. Nominal interdiffusion of PZT/PLT/substrates was found in the depth profiles obtained from secondary ion mass spectroscopy (SIMS). The PZT films over the entire compositional range of Zr/Ti ratio exhibited relative dielectric constant which was consistent with the dependence of bulk PZT; however, obvious changes of lattice spacings at phase boundaries were not found from X-ray diffraction (XRD) measurement.

引用

页码：574 / 577

页数：4

共 9 条

[1] EPITAXIAL LEAD-ZIRCONATE-TITANATE THIN-FILMS ON SAPPHIRE [J].

BRAUN, W ;

KWAK, BS ;

ERBIL, A ;

BUDAI, JD ;

WILKENS, BJ .

APPLIED PHYSICS LETTERS, 1993, 63 (04) :467-469

[2] EFFECTS OF CRYSTALLITE SIZE IN PBTIO3 THIN-FILMS [J].

DEKEIJSER, M ;

DORMANS, GJM ;

VANVELDHOVEN, PJ ;

DELEEUW, DM .

APPLIED PHYSICS LETTERS, 1991, 59 (27) :3556-3558

[3] PREPARATION AND PROPERTIES OF LEAD ZIRCONATE-TITANATE THIN-FILMS [J].

IIJIMA, K ;

UEDA, I ;

KUGIMIYA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2149-2151

[4] LOW-TEMPERATURE PREPARATION OF PB(ZR, TI)O3 THIN-FILMS ON (PB, LA)TIO3 BUFFER LAYER BY MULTI-ION-BEAM SPUTTERING [J].

KANNO, I ;

HAYASHI, S ;

KAMADA, T ;

KITAGAWA, M ;

HIRAO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4057-4060

[5] FERROELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE FILMS PREPARED BY LASER ABLATION [J].

KIDOH, H ;

OGAWA, T ;

MORIMOTO, A ;

SHIMIZU, T .

APPLIED PHYSICS LETTERS, 1991, 58 (25) :2910-2912

[6] CRYSTALLINE-STRUCTURE OF PBTIO3 THIN-FILMS BY MULTIPLE CATHODE SPUTTERING [J].

MAIWA, H ;

ICHINOSE, N ;

OKAZAKI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B) :3029-3032

[7] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF C-AXIS ORIENTED PZT THIN-FILMS [J].

OKADA, M ;

TOMINAGA, K ;

ARAKI, T ;

KATAYAMA, S ;

SAKASHITA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (04) :718-722

[8] CRYSTAL STRUCTURE OF PB(ZR-TI)O3 [J].

SHIRANE, G ;

SUZUKI, K .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1952, 7 (03) :333-333

[9] PREPARATION OF EPITAXIAL PB(ZRXTI1-X)O3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, PYROELECTRIC, AND FERROELECTRIC PROPERTIES [J].

TAKAYAMA, R ;

TOMITA, Y .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (04) :1666-1670

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