PHOTO CHEMICAL VAPOR-DEPOSITION OF METAL-OXIDE FILMS RELATING TO BI-SR-CA-CU-O SUPERCONDUCTOR

被引：5

作者：

KOINUMA, H

CHAUDHARY, KA

NAKABAYASHI, M

SHIRAISHI, T

HASHIMOTO, T

KITAZAWA, K

SUEMUNE, Y

YAMAMOTO, T

机构：

[1] TOKAI UNIV,FAC ENGN,DEPT COMMUN,HIRATSUKA,KANAGAWA 25912,JAPAN

[2] UNIV TOKYO,FAC ENGN,DEPT IND CHEM,BUNKYO KU,TOKYO 113,JAPAN

[3] NIHON KAGAKU SANGYO CO LTD,SOKA 340,JAPAN

[4] TOKYO INST TECHNOL,RESOURCES UTILIZAT RES LAB,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 04期

关键词：

HIGH-TC SUPERCONDUCTOR; BI-SR-CA-CU-O SYSTEM; PHOTO CVD; OXIDE FILM; LOW TEMPERATURE GROWTH; CA-CU-O;

D O I：

10.1143/JJAP.30.656

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Oxide films relating to high-T(c) superconducting Bi-Sr-Ca-Cu-O system were prepared by an oxidative photochemical vapor deposition using a low pressure mercury lamp. Bismuth oxide film was prepared by the photo decomposition of Bi(C6H5)3 in the presence of oxygen (20 Torr) at 300-degrees-C, while no film was obtained without the UV light irradiation. The UV light irradiation increased X-ray diffraction peak intensities of CuO, CaCO3, and SrCO3 films prepared from Cu(dipyvaloylmethanate: DPM)2, Ca(DPM)2, and Sr(DPM)2, respectively, at a temperatures of 400-degrees-C. By simultaneous supply of Ca(DPM)2 and Cu(DPM)2, Ca2CuO3 crystalline film without CaCO3 contamination was formed at 400-degrees-C. Without the UV irradiation, amorphous Ca-Cu-O film was obtained by thermal CVD. Photochemical reactions using N2O and NO2 instead of O2 were also examined.

引用

页码：656 / 660

页数：5