STRUCTURE-ANALYSIS OF OVAL DEFECT ON MOLECULAR-BEAM EPITAXIAL GAAS LAYER BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION

被引:38
作者
KAKIBAYASHI, H
NAGATA, F
KATAYAMA, Y
SHIRAKI, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 11期
关键词
D O I
10.1143/JJAP.23.L846
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:L846 / L848
页数:3
相关论文
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