ION CHEMISTRY IN SILANE DC DISCHARGES

被引：82

作者：

CHATHAM, H ^{[1
]}

GALLAGHER, A ^{[1
]}

机构：

[1] NBS,BOULDER,CO 80303

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 01期

关键词：

D O I：

10.1063/1.335702

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：159 / 169

页数：11

共 35 条

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[8]

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APPLIED PHYSICS LETTERS, 1983, 43 (11) :1012-1014

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