TOMOGRAPHY OF MICROSTRUCTURES BY SCANNING MICRO-RBS PROBE

被引：22
作者：
KINOMURA, A
TAKAI, M
MATSUO, T
SATOU, M
NAMBA, S
CHAYAHARA, A
机构：
[1] OSAKA UNIV, EXTREME MAT RES CTR, TOYONAKA, OSAKA 560, JAPAN
[2] GOVT IND RES INST, IKEDA, OSAKA 563, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 07期
关键词：
D O I：
10.1143/JJAP.28.L1286
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L1286 / L1289
页数：4
相关论文
共 8 条
  • [1] Chu W. K., 1978, BACKSCATTERING SPECT
  • [2] PRODUCTION AND USE OF A NUCLEAR MICROPROBE OF IONS AT MEV ENERGIES
    COOKSON, JA
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1979, 165 (03): : 477 - 508
  • [3] 3-DIMENSIONAL LITHIUM MICROANALYSIS BY THE LI-7(P,ALPHA) REACTION
    HECK, D
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (03) : 486 - 490
  • [4] MICROBEAM LINE WITH 1.5 MEV HELIUM-IONS AND PROTONS AT OSAKA
    INOUE, K
    TAKAI, M
    MATSUNAGA, K
    IZUMI, M
    GAMO, K
    NAMBA, S
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (04) : 580 - 591
  • [5] RBS ANALYSIS OF BEAM-PROCESSED MICROAREA BY FOCUSED MEV ION-BEAM
    KINOMURA, A
    TAKAI, M
    MATSUO, T
    UJIIE, S
    NAMBA, S
    SATOU, M
    KIUCHI, M
    FUJII, K
    SHIOKAWA, T
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) : 40 - 42
  • [6] MICROPROBE USING FOCUSED 1.5 MEV HELIUM ION AND PROTON-BEAMS
    KINOMURA, A
    TAKAI, M
    INOUE, K
    MATSUNAGA, K
    IZUMI, M
    MATSUO, T
    GAMO, K
    NAMBA, S
    SATOU, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) : 862 - 866
  • [7] SINGLE CRYSTALLINE GERMANIUM ISLAND ON INSULATOR BY ZONE-MELTING RECRYSTALLIZATION
    TAKAI, M
    TANIGAWA, T
    GAMO, K
    NAMBA, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (10): : L624 - L626
  • [8] MICROANALYSIS BY FOCUSED MEV HELIUM ION-BEAM
    TAKAI, M
    MATSUNAGA, K
    INOUE, K
    IZUMI, M
    GAMO, K
    SATO, M
    NAMBA, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05): : L550 - L553
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