FUNDAMENTAL INVESTIGATIONS OF SECONDARY ION PRODUCTION DURING ION-BOMBARDMENT

被引:17
作者
ISHITANI, T
TAMURA, H
SHINMIYO, T
机构
[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI 185,TOKYO,JAPAN
[2] HITACHI LTD NAKA WORKS,KATSUTA,IBARAKI,JAPAN
关键词
D O I
10.1016/0039-6028(76)90382-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:179 / 188
页数:10
相关论文
共 6 条
[1]   ION PROBE MASS-SPECTROMETRY - OVERVIEW [J].
EVANS, CA .
THIN SOLID FILMS, 1973, 19 (01) :11-19
[2]   BOMBARDMENT-INDUCED PHOTON EMISSION FROM A1 AND A12O3 TARGETS [J].
KELLY, R ;
KERKDIJK, CB .
SURFACE SCIENCE, 1974, 46 (02) :537-557
[3]   REMOVAL OF GAS-PHASE IONS BY ENERGY SELECTION OF SECONDARY IONS [J].
NAKAMURA, K ;
TAMURA, H ;
KONDO, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (05) :917-918
[4]   THEORETICAL AND EXPERIMENTAL STUDY OF IONIZATION PROCESSES DURING LOW-ENERGY ION SPUTTERING [J].
SROUBEK, Z .
SURFACE SCIENCE, 1974, 44 (01) :47-59
[5]  
TAMURA H, 1972, 6TH P INT C XRAY OPT, P423
[6]   THEORETICAL AND EXPERIMENTAL ASPECTS OF SECONDARY ION MASS-SPECTROMETRY [J].
WERNER, HW .
VACUUM, 1974, 24 (10) :493-504