HOLLOW-CATHODE SPUTTERING SOURCE FOR THE PRODUCTION OF GAS-PHASE METAL ATOMS OF THE REFRACTORY ELEMENTS

被引：34
作者：
TRKULA, M
HARRIS, DO
HILBORN, RC
机构：
[1] UNIV CALIF SANTA BARBARA,INST QUANTUM,SANTA BARBARA,CA 93106
[2] OBERLIN COLL,DEPT PHYS,OBERLIN,OH 44074
来源：
CHEMICAL PHYSICS LETTERS | 1982年 / 93卷 / 04期
关键词：
D O I：
10.1016/0009-2614(82)83706-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：345 / 349
页数：5
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