CHARGING CONTROL USING PULSED SCANNING ELECTRON-MICROSCOPY

被引：0
作者：
WONG, WK
PHANG, JCH
THONG, JTL
机构：
来源：
SCANNING | 1995年 / 17卷 / 05期
关键词：
CHARGING CONTROL; HIGH-VOLTAGE SEM; BEAM PULSING; IMAGE PROCESSING;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper describes a novel method to observe highly charging specimens at high-beam voltages without specimen preparation. It is found that the technique greatly reduces charging artifacts such as image shift, astigmatism, and defocussing without sacrificing image quality. Images obtained of uncoated specimens are found to be comparable to gold-coated specimens and without exhibiting charging effects. The technique also allows the study of charge distribution effects in specimen charging of which very little understanding exists, particularly as far as the spatial and time dependent properties of charging are concerned.
引用
收藏
页码：312 / 315
页数：4
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