DETERMINATION OF SEMICONDUCTOR PARAMETERS AND OF THE VERTICAL STRUCTURE OF DEVICES BY NUMERICAL-ANALYSIS OF ENERGY-DEPENDENT EBIC MEASUREMENTS

被引：39
作者：
KITTLER, M
SCHRODER, KW
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1983年 / 77卷 / 01期
关键词：
D O I：
10.1002/pssa.2210770117
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：139 / 151
页数：13
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