COMPRESSIVE STRESS OF THIN CUBIC BN FILMS PREPARED BY R.F. REACTIVE SPUTTERING ON R.F.-BIASED SUBSTRATES

被引：21
作者：
GORANCHEV, B
SCHMIDT, K
REICHELT, K
机构：
来源：
THIN SOLID FILMS | 1987年 / 149卷 / 01期
关键词：
D O I：
10.1016/0040-6090(87)90256-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L77 / L80
页数：4
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