A UHV COMPATIBLE SI(LI) X-RAY-DETECTOR

The design and performance of a new, all bakeable, X-ray Si(Li) detector is reported. The detector assembly is fully compatible with a UHV environment and is therefore well suited to surface analytical instruments unlike more conventional designs which require the withdrawal of the detector when the system is heated. During the bakeout the detector is kept cool using cryogenic shielding, and the consumption of liquid nitrogen increases to about 1.5 - 2 times its normal rate. The detector is fitted to the York multi-spectral Auger microscope (MULSAM) and has been in operation for the last 12 months. X-ray spectra from an Al/Si circuit and a Cu standard are shown and compared with those from another detector fitted to a commercial SEM.