CHEMICAL-DEPOSITION OF TIO2 LAYERS ON GAAS

被引：17
作者：
BERTRAND, PA
FLEISCHAUER, PD
机构：
来源：
THIN SOLID FILMS | 1983年 / 103卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(83)90433-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：167 / 175
页数：9
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